Soft Condensed Matter
AI-assisted design of chemically recyclable polymers for food packaging
Brandon K. Phan, Chiho Kim, Janhavi Nistane et al. (+9 more)
Polymer packaging plays a crucial role in food preservation but poses major challenges in recycling and environmental persistence. To address the need for sustainable, high-performance alternatives, we employed a
polymer informatics workflow to identify single- and multi-layer drop-in replacements for
polymer-based packaging materials. Machine learning (ML) models, trained on carefully curated
polymer datasets, predicted eight key properties across a library of approximately 7.4 million ring-opening polymerization (ROP)
polymers generated by virtual forward synthesis (VFS). Candidates were prioritized by the enthalpy of polymerization, a critical metric for chemical recyclability. This screening yielded thousands of promising candidates, demonstrating the feasibility of replacing diverse packaging architectures. We then experimentally validated poly(p-dioxanone) (poly-PDO), an existing ROP
polymer whose barrier performance had not been previously reported. Validation showed that poly-PDO exhibits strong water barrier performance, mechanical and thermal properties consistent with predictions, and excellent chemical recyclability (95% monomer recovery), thereby meeting the design targets and underscoring its potential for sustainable packaging. These findings highlight the power of informatics-driven approaches to accelerate the discovery of sustainable
polymers by uncovering opportunities in both existing and novel chemistries.
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All authors Brandon K. Phan, Chiho Kim, Janhavi Nistane, Wei Xiong, Haoyu Chen, Woo Jin Jang, Farzad Gholami, Yongliang Su, Jerry Qi, Ryan Lively, Will Gutekunst, Rampi Ramprasad
Statistical Mechanics
Exact Mapping of Nonequilibrium to Equilibrium Phase Transitions for Systems in Contact with Two Thermal Baths
Iago N. Mamede, Carlos E. Fiore, Gustavo A. L. Forão et al. (+2 more)
We show that a large class of nonequilibrium many-body systems in contact with two thermal baths admit an exact mapping onto equivalent
equilibrium systems. This mapping provides direct access to nonequilibrium phase transition points from known
equilibrium results, irrespective of the model, interaction
topology, or distance from
equilibrium. We verify the universality of this correspondence using paradigmatic models (Ising, Potts, and Blume-Capel), and highlight distinctive features in
entropy production close to critical and tricritical points. Our findings connect
equilibrium and nonequilibrium statistical mechanics, with implications for microscopic thermal machines and
stochastic thermodynamics.
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All authors Iago N. Mamede, Carlos E. Fiore, Gustavo A. L. Forão, Karel Proesmans, André P. Vieira
Strongly Correlated Electrons · Cross-listed from quant-ph
Superconducting pairing correlations on a trapped-ion quantum computer
Etienne Granet, Sheng-Hsuan Lin, Kevin Hémery et al. (+31 more)
The
Fermi-Hubbard model is the starting point for the simulation of many strongly correlated materials, including high-temperature
superconductors, whose modelling is a key motivation for the construction of
quantum simulation and computing devices. However, the detection of superconducting pairing correlations has so far remained out of reach, both because of their off-diagonal character - which makes them inaccessible to local density measurements - and because of the difficulty of preparing superconducting states. Here, we report measurement of significant pairing correlations in three different regimes of
Fermi-Hubbard models simulated on Quantinuum's Helios trapped-ion
quantum computer. Specifically, we measure non-
equilibrium pairing induced by an electromagnetic field in the half-filled square
lattice model, d-wave pairing in an approximate ground state of the checkerboard Hubbard model at $1/6$-doping, and s-wave pairing in a
bilayer model relevant to nickelate
superconductors. These results show that a
quantum computer can reliably create and probe physically relevant states with superconducting pairing correlations, opening a path to the exploration of superconductivity with
quantum computers.
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All authors Etienne Granet, Sheng-Hsuan Lin, Kevin Hémery, Reza Haghshenas, Pablo Andres-Martinez, David T. Stephen, Anthony Ransford, Jake Arkinstall, M.S. Allman, Pete Campora, Samuel F. Cooper, Robert D. Delaney, Joan M. Dreiling, Brian Estey, Caroline Figgatt, Cameron Foltz, John P. Gaebler, Alex Hall, Ali Husain, Akhil Isanaka, Colin J. Kennedy, Nikhil Kotibhaskar, Ivaylo S. Madjarov, Michael Mills, Alistair R. Milne, Annie J. Park, Adam P. Reed, Brian Neyenhuis, Justin G. Bohnet, Michael Foss-Feig, Andrew C. Potter, Ramil Nigmatullin, Mohsin Iqbal, Henrik Dreyer
Other Condensed Matter · Cross-listed from hep-th
Euler-Heisenberg actions for gauge-axial background vectors: Hessian diagonalization, sector classification, and applications
Lucas Pereira de Souza
We derive the closed-form one-loop Euler-Heisenberg effective actions for Dirac
fermions coupled simultaneously to classical electromagnetic vector and massive pseudo-vector backgrounds within a controlled quasi-static approximation. Through complete diagonalization of the functional Hessian, we systematically delineate the parameter space into distinct sectors characterized by stability properties and spectral structure. We identify subspaces that encompass and extend results from previous studies into a broader class, admitting propagating axial fields as physically viable regimes; strikingly, we note sectors presenting chirality-asymmetric instability. This addresses long-standing questions regarding the well-defined nature, diagonalizability, and stability of these models. From the effective actions, we derive novel nonperturbative pair-production rates for simultaneously propagating electromagnetic and axial vector backgrounds; remarkably, we find pronounced
vacuum stabilization compared to previous results. Furthermore, we derive the non-perturbative contributions to the
chiral current divergence, which enables dynamical
chiral symmetry breaking and show that the electromagnetic coupling induces instanton-like configurations for the axial field, even when it is not a fundamental gauge field. As a proof-of-concept, we analyze a cosmological toy model of baryogenesis driven by an axial vector, providing numerical estimates that support the viability of this hypothesis. Additionally, we outline qualitative predictions for Weyl/Dirac semi-metals and briefly discuss potential applications in related phenomena, such as
Quark-
Gluon plasma, Electroweak scenarios and the Strong-CP problem.
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Mesoscale and Nanoscale Physics
Current cross-correlation spectroscopy of Majorana bound states
Michael Ridley, Eliahu Cohen, Christian Flindt et al. (+1 more)
The clock speed of topological
quantum computers based on Majorana zero mode (MZM)-supporting nanoscale devices is limited by the time taken for electrons to traverse the device. We employ the time-dependent Landauer-Büttiker transport theory for current cross-lead correlations in a superconducting nanowire junction hosting MZMs. From the time-dependent
quantum noise, we are able to extract traversal times for electrons crossing the system. After demonstrating a linear scaling of traversal times with nanowire length, we present a heuristic formula for the traversal times which accurately captures their behaviour. We then connect our framework to a proposed experimental verification of this discriminant between spurious and genuine MZMs utilizing time-resolved transport measurements.
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All authors Michael Ridley, Eliahu Cohen, Christian Flindt, Riku Tuovinen
Statistical Mechanics
Nonequilibrium Macroscopic Response Relations for Counting Statistics
Jiming Zheng and Zhiyue Lu
Understanding how macroscopic nonequilibrium systems respond to changes in external or internal parameters remains a fundamental challenge in physics. In this work, we report a parameter transitional
symmetry valid for macroscopic dynamics arbitrarily far from
equilibrium. The
symmetry leads to exact response relations and gives meaningful expansions in both linear and short-time regimes. This framework provides a universal description of macroscopic response phenomena arbitrarily far from
equilibrium - including non-stationary processes and time-dependent attractors. The theory is validated and demonstrated numerically using the Willamowski-Rossler model, which exhibits rich dynamical behaviors including limit cycles and chaos.
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Strongly Correlated Electrons
Vibhu Mishra
We propose a model of metallic critical point which we study at $T=0$ in the large-$N$ limit. We start with two species of
fermions $u_i, d_i$, each with $N$
flavors and a gas of
matrix bosons $b_{ij}$ with $N^2$ components. The
fermions interact with each other via the intermediate
boson as $\int b_{ij}^{\dagger} \, u_i^{\dagger}d_j$. The
bosons have a bare dispersion $\varepsilon_{\textbf{q}}^b = \lambda_z |\textbf{q}|^z$ and we study the problem in $d$ spatial dimensions. We show that for $d = z+1,$ the electronic self energy shows marginal
Fermi liquid behavior. We first evaluate the fermionic self energy $\Sigma(i\omega)$ using the standard approximate
boson self energy $\Pi(\textbf{q}, i\nu) \propto |\nu|/|\textbf{q}|$ and find that $\Sigma(i\omega) \sim \omega \ln(N/|\omega|)$ which shows a much weaker dependence on $N$ when compared with similar results from non-SYK large-$N$ Ising-nematic models. Then we evaluate $\Sigma(i\omega)$ again using a more precise form of $\Pi(\textbf{q}, i\nu)$ which allows us to study the interplay between $N \rightarrow \infty$ limit for which $\Sigma(i\omega) \sim \omega \ln(1/|\omega|)$, and the $\omega \rightarrow 0$ limit where we recover $\Sigma(i\omega) \sim \omega \ln(N/|\omega|)$. We also use the full bosonic self energy to obtain the correction to the bosonic specific heat as $\frac{T}{N} \ln(1/T)$. Since there are $N^2$
bosons and $N$
fermions, the bulk heat capacity for both
fermions and
bosons shows nearly identical functional form $NVT \ln(N/T)$ and $NVT \ln(1/T)$ respectively for $T \rightarrow 0$. This suggests that coupling the hybridization operator $u^{\dagger}d$ to non-relativistic
bosons for $d=3$ and relativistic
bosons for $d=2$ provides a simple route to marginal
Fermi liquid scaling.
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Superconductivity
Collective excitations and divergent spin currents in non-centrosymmetric superconductors
Markus Lysne, Philipp Werner and Nikolaj Bittner
We study the collective modes in a non-centrosymmetric
superconductor with Rashba
spin-orbit coupling under
laser irradiation. The concept of Anderson Pseudospin Resonance allows to reveal how
laser driving gives rise not only to the established resonant enhancement of the third harmonic response, but also to a resonant enhancement in the second harmonic response of the
spin current. We propose a theory which explains the phenomenon without including interband transitions. The theory is corroborated by numerical simulations which incorporate interband effects and allow us to clarify the signatures of the collective modes in the long-time dynamics of the
superconductor.
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Materials Science · Cross-listed from physics.chem-ph
Non-adiabatic perturbation theory of the exact factorisation
Matisse Wei-Yuan Tu and E.K.U. Gross
We present a novel nonadiabatic perturbation theory (NAPT) for correlated systems of electrons and
nuclei beyond the Born-Oppenheimer (BO) approximation. The essence of the method is to exploit the smallness of the electronic-to-
nuclear mass ratio by treating the electron-
nuclear correlation terms in the electronic equation of motion of the exact factorisation (EF) framework as perturbation. We prove that any finite-order truncation of the NAPT preserves the normalisation of the conditional electronic factor as well as the gauge covariance of the resulting perturbative equations of motion. We illustrate the usefulness of NAPT by obtaining nonadiabatic corrections to the BO Berry phase in Jahn–Teller systems with a conical intersection. It well captures the departure of the exact Berry phase from being topological via the lowest-order NAPT. By removing the conical intersection with a constant gap, it further yields the correct scaling of the Berry phase toward zero.
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Disordered Systems and Neural Networks · Cross-listed from cs.LG
Bulk-boundary decomposition of neural networks
Donghee Lee, Hye-Sung Lee and Jaeok Yi
We present the bulk–boundary decomposition as a new framework for understanding the training dynamics of deep neural networks. Starting from the
stochastic gradient descent formulation, we show that the Lagrangian can be reorganized into a data-independent bulk term and a data-dependent boundary term. The bulk captures the intrinsic dynamics set by network architecture and activation functions, while the boundary reflects
stochastic interactions from training samples at the input and output layers. This decomposition exposes the local and homogeneous structure underlying deep networks. As a physical consequence of locality and homogeneity, we derive the energy continuity equation within a deep neural network.
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Mesoscale and Nanoscale Physics
Dynamical Phase Transitions Across Slow and Fast Regimes in a Two-Tone Driven Duffing Resonator
Soumya S. Kumar, Javier del Pino, Letizia Catalini et al. (+2 more)
The response of nonlinear resonators to multifrequency driving reveals rich dynamics beyond conventional single-tone theory. We study a Duffing resonator under bichromatic excitation and identify a competition between the two drives, governed by their detuning and relative amplitudes. In the slow-beating regime, where the tones are closely spaced, the secondary drive acts as a modulation that induces dynamical phase transitions between coexisting stationary states. We introduce the cycle-averaged amplitude as an order parameter and map the resulting phase diagram as a function of the drive detuning and amplitude ratio, capturing the pronounced asymmetry observed for blue versus red detuning in experiment. We devise a model to link the onset of these transitions to the resonance properties around the nonlinear stationary mode of the system. Our results provide a framework for controlling driven nonlinear systems, enabling state manipulation, and sensing in nanomechanical, optical, and superconducting
circuit platforms.
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All authors Soumya S. Kumar, Javier del Pino, Letizia Catalini, Alexander Eichler, Oded Zilberberg
Statistical Mechanics · Cross-listed from quant-ph
Stability of mixed-state phases under weak decoherence
Yifan F. Zhang and Sarang Gopalakrishnan
We prove that the Gibbs states of classical, and commuting-Pauli,
Hamiltonians are stable under weak local decoherence: i.e., we show that the effect of the decoherence can be locally reversed. In particular, our conclusions apply to finite-temperature
equilibrium critical points and ordered low-temperature phases. In these systems the unconditional spatio-temporal correlations are long-range, and local (e.g., Metropolis) dynamics exhibits critical slowing down. Nevertheless, our results imply the existence of local "decoders" that undo the decoherence, when the decoherence strength is below a critical value. An implication of these results is that thermally stable
quantum memories have a threshold against decoherence that remains nonzero as one approaches the critical temperature. Analogously, in
diffusion models, stability of data distributions implies the existence of computationally-efficent local denoisers in the late-time generation dynamics.
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Statistical Mechanics · Cross-listed from hep-th
Gradient RG Flow in Scalar-Fermion QFTs
William H. Pannell, William Patrick Ronayne and Andreas Stergiou
The gradient property of the renormalisation group (RG) is examined to four-loop order in scalar-
fermion systems in $d=4$ and $d=4-\varepsilon$ dimensions. The crucial role played by the beta shift, which is a modification of the standard dim-reg beta function, is elucidated, and specific conditions that it needs to satisfy for the RG flow to be gradient are derived. Over a thousand gradient-flow conditions are found, all of which are scheme-independent and satisfied whenever the full set of results needed to check them is available. It is shown, in the framework of the $\varepsilon=4-d$ expansion, that the space of conformal field theories (CFTs) is dominated by those with non-zero beta shift as the number of fields grows. Physical properties of CFTs obtained as solutions where the beta functions are not zero in the $\varepsilon$ expansion are discussed.
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Statistical Mechanics · Cross-listed from hep-th
Entanglement asymmetry in gauge theories: chiral anomaly in the finite temperature massless Schwinger model
Adrien Florio and Sara Murciano
The
entanglement asymmetry has emerged in recent years as a practical quantity to study phases of matter. We present the first study of
entanglement asymmetry in gauge theories by considering the
chiral anomaly of the analytically solvable massless Schwinger model at both zero and finite temperatures. At zero temperature, we find the asymmetry exhibits logarithmic growth with system size. At finite temperature, we show that it is parametrically more sensitive to
chiral symmetry-breaking than the corresponding local order parameter: while the
chiral condensate decays exponentially, the asymmetry decreases only logarithmically. This establishes the
entanglement asymmetry as a promising tool to probe (finite-temperature) phase transitions in gauge theories.
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Strongly Correlated Electrons · Cross-listed from hep-th
Intrinsic NISPT Phases, igNISPT Phases, and Mixed Anomalies of Non-Invertible Symmetries
Da-Chuan Lu and Zhengdi Sun
A bosonic non-invertible
Symmetry Protected Topological (NISPT) phase in (1+1)-dim is referred to as $\textit{intrinsic}$ if it cannot be mapped, under discrete gauging, to a gapped phase with any invertible
symmetry, that is, if it is protected by a non-group-theoretical fusion category
symmetry. We construct the intrinsic NISPT phases by performing discrete gauging in a partial SSB phase with a fusion category
symmetry that has a certain mixed anomaly. Sometimes, the anomaly of that
symmetry category can be alternatively understood as a self-anomaly of a proper categorical sub-
symmetry; when this is the case, the same gauging provides an anomaly resolution of this anomalous categorical sub-
symmetry. This allows us to construct intrinsic gapless SPT (igSPT) phases, where the anomalous faithfully acting
symmetry is non-invertible; and we refer to such igSPT phases as igNISPT phases. We provide two concrete
lattice models realizing an intrinsic NISPT phase and an igNISPT phase, respectively. We also generalize the construction of intrinsic NISPT phases to (3+1)-dim.
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Materials Science · Cross-listed from physics.chem-ph
Edge Irregularity Strength: A Complementary Descriptor to Topological Indices in QSPR and QSAR Studies
U. Vijaya Chandra Kumar, H.M. Nagesh and Narahari N
In chemical graph theory, topological indices are widely used as numerical descriptors for establishing quantitative structure-property relationships (QSPR) and quantitative structure-activity relationships (QSAR). These indices successfully correlate molecular structure with various physicochemical and biological properties. In addition to these methods, the concept of edge irregularity strength, a graph labeling measure, offers another perspective for representing structural characteristics. In this context, the edge irregularity strength concept provides a systematic way of assigning numerical labels to atoms based on specific rules. In this work, we explore the chemical applicability of the edge irregularity strength and demonstrate that it can also serve as a predictive tool for physicochemical properties, similar to topological indices. The findings show that the edge irregularity strength captures molecular features and complements existing approaches to structure-property analysis in chemical graph theory.
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Materials Science · Cross-listed from cs.LG
COFAP: A Universal Framework for COFs Adsorption Prediction through Designed Multi-Modal Extraction and Cross-Modal Synergy
Zihan Li, Mingyang Wan, Mingyu Gao et al. (+4 more)
Covalent organic frameworks (COFs) are promising adsorbents for gas adsorption and separation, while identifying the optimal structures among their vast design space requires efficient high-throughput screening. Conventional machine-learning predictors rely heavily on specific gas-related features. However, these features are time-consuming and limit scalability, leading to inefficiency and labor-intensive processes. Herein, a universal COFs adsorption prediction framework (COFAP) is proposed, which can extract multi-modal structural and chemical features through deep learning, and fuse these complementary features via cross-modal
attention mechanism. Without relying on explicit gas-specific thermodynamic descriptors, COFAP achieves state-of-the-art prediction performance on the hypoCOFs
dataset under the conditions investigated in this study, outperforming existing approaches. Based on COFAP, we also found that high-performing COFs for gas separation concentrate within a narrow range of pore size and surface area. A weight-adjustable prioritization scheme is also developed to enable flexible, application-specific ranking of candidate COFs for researchers. Superior efficiency and accuracy render COFAP directly deployable in crystalline porous materials.
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All authors Zihan Li, Mingyang Wan, Mingyu Gao, Xishi Tai, Zhongshan Chen, Xiangke Wang, Feifan Zhang
Materials Science · Cross-listed from cs.DB
Towards Defect Phase Diagrams: From Research Data Management to Automated Workflows
Khalil Rejiba, Sang-Hyeok Lee, Christina Gasper et al. (+3 more)
Defect phase diagrams provide a unified description of
crystal defect states for materials design and are central to the scientific objectives of the Collaborative Research Centre (CRC) 1394. Their construction requires the systematic integration of heterogeneous experimental and simulation data across research groups and locations. In this setting, research data management (RDM) is a key enabler of new scientific insight by linking distributed research activities and making complex data reproducible and reusable. To address the challenge of heterogeneous data sources and formats, a comprehensive RDM infrastructure has been established that links experiment, data, and analysis in a seamless workflow. The system combines: (1) a joint electronic laboratory notebook and laboratory information management system, (2) easy-to-use large-object data storage, (3) automatic metadata extraction from heterogeneous and proprietary file formats, (4) interactive provenance graphs for data exploration and reuse, and (5) automated reporting and analysis workflows. The two key technological elements are the openBIS electronic laboratory notebook and laboratory information management system, and a newly developed companion application that extends openBIS with large-scale data handling, automated metadata capture, and
federated access to distributed research data. This integrated approach reduces friction in data capture and curation, enabling traceable and reusable
datasets that accelerate the construction of defect phase diagrams across institutions.
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All authors Khalil Rejiba, Sang-Hyeok Lee, Christina Gasper, Martina Freund, Sandra Korte-Kerzel, Ulrich Kerzel
Materials Science
Posterior corrections for systematic distortions in atomic-resolution images from hexagonal crystals
Tyler Bortel and Peter Moeck
Digital images from
crystals, as projected from the third spatial dimension and recorded in atomic resolution with any kind of real-world microscope, feature necessarily broken
symmetries of the translation-periodicity-restricted Euclidean plane. The
symmetry breakings are due to both the imaging process and the real structure of the imaged
crystal, with the former cause typically dominating. A posterior algorithmic reduction of the
symmetry breaking in such images constitutes, thus, often a correction for many of the distortions that were introduced by the imaging processes. Numerically quantified restorations of such
symmetries can, therefore, be used to demonstrate the efficacy of a newly implemented posterior correction method for atomic-resolution images from hexagonal
crystals. Recently developed information theory based methods are here shown to be suitable for this purpose. Thirteen experimental atomic-resolution images from graphite and monolayer molybdenite (MoS2), as respectively obtained by scanning tunneling microscopy, atomic force microscopy in the torsional resonance mode, and aberration-corrected parallel illumination transmission electron microscopy served as test cases in our larger (in its totality so far unpublished) study, from which we quote here. The source code of the software that was used for our distortion corrections and the whole report on that study are freely available on GitHub.
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Strongly Correlated Electrons
Quantum Acoustics Demystifies the Strange Metals
Eric J. Heller, Alhun Aydin, Anton M. Graf et al. (+11 more)
Phonons have long been thought to be incapable of explaining key phenomena in strange metals, including linear-in-T Planckian resistivity from high to very low temperatures. We argue that these conclusions were based on static, perturbative approaches that overlooked essential time-dependent and nonperturbative electron-
lattice physics. In fact “
phonons” are not the best target for discussion, just like “
photons” are not the best way to think about Maxwell's equations.
Quantum optics connects
photons and electromagnetism, as developed 60 years ago by Glauber and others. We have been developing the parallel world of
quantum acoustics. Far from being only of academic interest, the new tools are rapidly exposing the secrets of the strange metals, revealing strong vibronic (vibration-electronic) interactions playing a crucial role forming polarons and charge density waves, linear-in-$T$ resistivity at the Planckian rate over thousands of degrees, resolution of the Drude peak infrared anomaly, and the absence of a $T^4$ low-temperature resistivity rise in 2D systems, and of a Mott-Ioffe-Regel resistivity saturation. We derive Planckian transport, polarons, CDWs, and pseudogaps from the Fröhlich model. The “new physics” has been hiding in this model all along, in the right parameter regime, if it is treated nonperturbatively. In the course of this work we have uncovered the generalization of Anderson localization to dynamic media: a universal Planckian
diffusion emerges, a “ghost” of Anderson localization. Planckian
diffusion is clearly defined and is more fundamental than the popular but elusive, model dependent concept of “Planckian speed limit”.
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All authors Eric J. Heller, Alhun Aydin, Anton M. Graf, Joost de Nijs, Yoel Zimmermann, Xiaoyu Ouyang, Shaobing Yuan, Zixuan Chai, Siyuan Chen, Jasper Jain, Mingxuan Xiao, Chenzheng Yu, Zhongling Lu, Joonas Keski-Rahkonen
Materials Science
Directional atomic layer etching of MgO-doped lithium niobate using Br-based plasma
Ivy I. Chen, Mariya Ezzy, Emily Hsue-Chi Shi et al. (+8 more)
Lithium niobate (LiNbO$_3$, LN) is a nonlinear optical material of high interest for integrated photonics with applications ranging from optical communications to
quantum information processing. The performance of on-chip devices based on thin-film lithium niobate (TFLN) is presently limited by fabrication imperfections such as sidewall surface roughness and geometry inhomogeneities over the chip. Atomic layer etching (ALE) could potentially be used to overcome these difficulties. Although an isotropic ALE process for LN has been reported, performing LN fabrication completely with ALE faces several challenges, including the lack of a directional ALE process for pattern transfer and the redeposition of involatile compounds. Here, we report a directional ALE process for LN consisting of sequential exposures of HBr/BCl$_3$/Ar
plasma for surface modification and Ar
plasma for removal. The HBr chemistry is found to decrease redeposition compared to F- and Cl-based
plasmas, which we attribute to the higher vapor pressures of Br-based products. A grating pattern etched entirely by the process (total etch depth of 220 nm) exhibits no aspect ratio dependent etching (ARDE) down to the smallest tested gap of 150 nm, in contrast to ion milling in which ARDE manifests even at 300 nm gaps for the same etch depth. The HBr
plasma chemistry is also found to support an isotropic process consisting of sequential exposures of H$_2$
plasma and HBr/BCl$_3$/Ar
plasma. These processes could be used together to perform the complete fabrication process for TFLN devices, eliminating imperfections arising from ion milling.
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All authors Ivy I. Chen, Mariya Ezzy, Emily Hsue-Chi Shi, Clifford F. Frez, Suraj, Lin Yi, Mahmood Bagheri, James R. Renzas, Alireza Marandi, Frank Greer, Austin J. Minnich